Integration of thick-film permanent magnets for MEMS applications

Jackson N.Pedrosa F.J.Bollero, AlbertoMathewson A.Olszewski O.Z.2020-12-042020-12-042016http://hdl.handle.net/20.500.12614/428enAtribución-NoComercial-SinDerivadas 3.0 Españahttp://creativecommons.org/licenses/by-nc-nd/3.0/es/Integration of thick-film permanent magnets for MEMS applicationsresearch article10.1109/JMEMS.2016.2574958