Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer CVD-grown graphene

Lancaster SuzanneArnay IciarGuerrero RubénGudín AdriánGuedeja-Marrón AlejandraDiez Toledano Jose ManuelGärtner JanAnadón AlbertoVarela MariaCamarero, JulioMikolajick ThomasPerna, PaoloSlesazeck Stefan2022-06-302022-06-302021-11-19http://hdl.handle.net/20.500.12614/2883application/pdfenAtribución-NoComercial-SinDerivadas 3.0 EspañaAtribución-NoComercial-SinDerivadas 3.0 Españahttp://creativecommons.org/licenses/by-nc-nd/3.0/es/Atomic layer deposition of ferroelectric Hf0.5Zr0.5O2 on single-layer CVD-grown graphenepreprintopen access