Study of high In-content AlInN deposition on p-Si(111) by RF-sputtering

Núñez-Cascajero A.Monteagudo-Lerma L.Valdueza-Felip S.Navío C.Monroy E.González-Herráez M.Naranjo F.B.2020-12-042020-12-042016http://hdl.handle.net/20.500.12614/462enAtribución-NoComercial-SinDerivadas 3.0 EspañaStudy of high In-content AlInN deposition on p-Si(111) by RF-sputteringconference paper10.7567/JJAP.55.05FB07open access