High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

Cartamil-Bueno S.J.Steeneken P.G.Tichelaar F.D.Navarro-Moratalla E.Venstra W.J.van Leeuwen R.Coronado E.van der Zant H.S.J.Steele G.A.Castellanos-Gomez A.2020-12-042020-12-042015http://hdl.handle.net/20.500.12614/1033enAtribución-NoComercial-SinDerivadas 3.0 Españahttp://creativecommons.org/licenses/by-nc-nd/3.0/es/High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2research article10.1007/s12274-015-0789-8