Calibration of piezoelectric positioning actuators using a reference voltage-to-displacement transducer based on quartz tuning forks

Castellanos-Gomez A.Arroyo C.R.Agraït, NicolásRubio-Bollinger G.2020-12-152020-12-152012http://hdl.handle.net/20.500.12614/2196enAtribución-NoComercial-SinDerivadas 3.0 EspañaCalibration of piezoelectric positioning actuators using a reference voltage-to-displacement transducer based on quartz tuning forksresearch article10.1017/S1431927611012839open access