Microfabrication of Sm2Co17 micromagnets for MEMS and micromotors using ultrashort pulsed hydro laser micromilling process

Villalba-Alumbreros G.Soler-Morala J.Bollero, AlbertoKanitz A.Hoppius J.Valiente-Blanco I.Diez-Jimenez E.2024-01-082024-01-082023http://hdl.handle.net/20.500.12614/3497enAtribución-NoComercial-SinDerivadas 3.0 Españahttp://creativecommons.org/licenses/by-nc-nd/3.0/es/Microfabrication of Sm2Co17 micromagnets for MEMS and micromotors using ultrashort pulsed hydro laser micromilling processresearch article10.1007/s00170-023-12642-0