Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene

Lancaster S.Arnay I.Guerrero R.Gudin A.Mikolajick T.Perna, PaoloSlesazeck S.2022-11-032022-11-032022http://hdl.handle.net/20.500.12614/3204enAtribución-NoComercial-SinDerivadas 3.0 EspañaOptimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown grapheneconference paper10.1109/ISAF51494.2022.9870121open access