TY - JOUR AU - Jackson N. AU - Pedrosa F.J. AU - Bollero, Alberto AU - Mathewson A. AU - Olszewski O.Z. PY - 2016 DO - 10.1109/JMEMS.2016.2574958 UR - http://hdl.handle.net/20.500.12614/428 T2 - Journal of Microelectromechanical Systems LA - en M2 - 716 TI - Integration of thick-film permanent magnets for MEMS applications TY - research article VL - 25 ER -