@article{20.500.12614/428, year = {2016}, url = {http://hdl.handle.net/20.500.12614/428}, title = {Integration of thick-film permanent magnets for MEMS applications}, doi = {10.1109/JMEMS.2016.2574958}, volume = {25}, journal = {Journal of Microelectromechanical Systems}, author = {Jackson N. and Pedrosa F.J. and Bollero, Alberto and Mathewson A. and Olszewski O.Z.}, }