TY - GEN AU - Núñez-Cascajero A. AU - Monteagudo-Lerma L. AU - Valdueza-Felip S. AU - Monroy E. AU - González-Herráez M. AU - Naranjo F.B. AU - Navío, Cristina PY - 2016 DO - 10.7567/JJAP.55.05FB07 UR - http://hdl.handle.net/20.500.12614/462 T2 - Japanese Journal of Applied Physics LA - en TI - Study of high In-content AlInN deposition on p-Si(111) by RF-sputtering TY - conference paper VL - 55 ER -