@null{20.500.12614/462, year = {2016}, url = {http://hdl.handle.net/20.500.12614/462}, title = {Study of high In-content AlInN deposition on p-Si(111) by RF-sputtering}, doi = {10.7567/JJAP.55.05FB07}, volume = {55}, journal = {Japanese Journal of Applied Physics}, author = {Núñez-Cascajero A. and Monteagudo-Lerma L. and Valdueza-Felip S. and Monroy E. and González-Herráez M. and Naranjo F.B. and Navío, Cristina}, }