RT Journal Article T1 High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2 A1 Cartamil-Bueno S.J., A1 Steeneken P.G., A1 Tichelaar F.D., A1 Navarro-Moratalla E., A1 Venstra W.J., A1 van Leeuwen R., A1 Coronado E., A1 van der Zant H.S.J., A1 Steele G.A., A1 Castellanos-Gomez A., YR 2015 FD 2015 LK http://hdl.handle.net/20.500.12614/1033 UL http://hdl.handle.net/20.500.12614/1033 LA en DS Repositorio institucional de IMDEA Nanociencia RD 5 jun. 2026