%0 Journal Article %A Cartamil-Bueno S.J. %A Steeneken P.G. %A Tichelaar F.D. %A Navarro-Moratalla E. %A Venstra W.J. %A van Leeuwen R. %A Coronado E. %A van der Zant H.S.J. %A Steele G.A. %A Castellanos-Gomez A. %T High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2 %D 2015 %U http://hdl.handle.net/20.500.12614/1033 %~