TY - JOUR AU - Villalba-Alumbreros G. AU - Soler-Morala J. AU - Bollero, Alberto AU - Kanitz A. AU - Hoppius J. AU - Valiente-Blanco I. AU - Diez-Jimenez E. PY - 2023 DO - 10.1007/s00170-023-12642-0 UR - http://hdl.handle.net/20.500.12614/3497 T2 - International Journal of Advanced Manufacturing Technology LA - en M2 - 4961 TI - Microfabrication of Sm2Co17 micromagnets for MEMS and micromotors using ultrashort pulsed hydro laser micromilling process TY - research article VL - 129 ER -