RT Journal Article T1 Microfabrication of Sm2Co17 micromagnets for MEMS and micromotors using ultrashort pulsed hydro laser micromilling process A1 Villalba-Alumbreros G., A1 Soler-Morala J., A1 Bollero, Alberto A1 Kanitz A., A1 Hoppius J., A1 Valiente-Blanco I., A1 Diez-Jimenez E., YR 2023 FD 2023 LK http://hdl.handle.net/20.500.12614/3497 UL http://hdl.handle.net/20.500.12614/3497 LA en DS Repositorio institucional de IMDEA Nanociencia RD 29 abr. 2026