Crystallization kinetics of TiO2 thin films: A comparative study of film deposition conditions

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dc.contributor.affiliation000000041762408X
dc.contributor.affiliationDepartment of Electrical Engineering, Division of Solid-State Electronics, The Ångström Laboratory, Uppsala University, Uppsala, SE-751 03, Sweden; Madrid Institute for Advanced Studies in Nanoscience (IMDEA Nanociencia), Ciudad Universitária de Cantoblanco, C/ Faraday 9, Madrid, ES-28049, Spain; Department of Materials Science and Engineering, Division of Solid-State Physics, The Ångström Laboratory, Uppsala University, Uppsala, SE-751 03, Sweden; Material Technology Research Institute, Pusan National University, Busan, KR-46241, South Korea; Busan Center, Korea Basic Science Institute, Busan, KR-46742, South Koreaen
dc.contributor.authorFernandes D.F.
dc.contributor.authorHernández J.J.
dc.contributor.authorKim S.
dc.contributor.authorMartín-Asensio A.
dc.contributor.authorPedraz P.
dc.contributor.authorYoon J.
dc.contributor.authorRodríguez, Isabel
dc.contributor.authorÖsterlund L.
dc.contributor.authorKubart T.
dc.date.accessioned2026-04-14T09:43:11Z
dc.date.available2026-04-14T09:43:11Z
dc.date.issued2026
dc.identifier.doi10.1016/j.tsf.2026.140867
dc.identifier.urihttps://hdl.handle.net/20.500.12614/4273
dc.issue.number140867
dc.journal.titleThin Solid Filmsen
dc.language.isoenen
dc.relation.projectIDTEMPThis work was supported by the European Union\u2019s Horizon 2020 research and innovation programme under grant agreement No. 862100, project NewSkin. We also gratefully acknowledge the support by the National Research Foundation of Korea (NRF) grant, funded by the Korean government (MSIT) (No. RS-2023-00212598), and by the Korea Basic Science Institute, under the R&D program (No. C526111). Additionally, this work is made possible with the financial support from the Spanish Ministry of Science and Innovation (MICINN) under the project FUNWIN (No. TED2021-130920B-C22), for which we are thankful. AMA acknowledges a predoctoral scholarship from the Spanish Ministry of Science and Innovation Severo Ochoa Program for Centers of Excellence in R&D (Grant No. PRE2019-88686). We are also grateful to Juan Carlos Mart\u00EDnez for his support during the experiments performed at the BL11 NCD-SWEET beamline at ALBA Synchrotron.
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 España
dc.rights.accessRightsopen accessen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.titleCrystallization kinetics of TiO2 thin films: A comparative study of film deposition conditionsen
dc.typeresearch articleen
dc.volume.number835

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