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Identifiers
URI:
http://hdl.handle.net/20.500.12614/462
DOI:
10.7567/JJAP.55.05FB07
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Title
Study of high In-content AlInN deposition on p-Si(111) by RF-sputtering
Journal title
Japanese Journal of Applied Physics
Author(s)
Núñez-Cascajero A.
Monteagudo-Lerma L.
Valdueza-Felip S.
Navío C.
Monroy E.
González-Herráez M.
Naranjo F.B.
Date
2016
Volume
55
Issue number
05FB07
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