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Integration of thick-film permanent magnets for MEMS applications

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dc.contributor.affiliation"Tyndall National Institute, University College Cork, Cork, T12 R5CP, Ireland"," Instituto Madrileño de Estudios Avanzados en Nanociencia, Ciudad Universitaria de Cantoblanco, Universidad Autónoma de Madrid, Madrid, 28049, Spain"en
dc.contributor.affiliation000000041762408X
dc.contributor.authorJackson N.
dc.contributor.authorPedrosa F.J.
dc.contributor.authorBollero, Alberto
dc.contributor.authorMathewson A.
dc.contributor.authorOlszewski O.Z.
dc.date.accessioned2020-12-04T11:13:03Z
dc.date.available2020-12-04T11:13:03Z
dc.date.issued2016
dc.identifier.doi10.1109/JMEMS.2016.2574958en
dc.identifier.urihttp://hdl.handle.net/20.500.12614/428
dc.issue.number7491336en
dc.journal.titleJournal of Microelectromechanical Systemsen
dc.language.isoenen
dc.page.initial716en
dc.relation.projectIDinfo:eu:eu-repo/grantAgreement/EC/FP7/604360/EU/MANpower - Energy Harvesting and Storage for Low Frequency Vibrations/MANPOWERen
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 España*
dc.rights.accessRightsopen accessen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/*
dc.titleIntegration of thick-film permanent magnets for MEMS applicationsen
dc.typeresearch articleen
dc.volume.number25en
dspace.entity.typePublication

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