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Development and characterization of cyclic olefin copolymer thin films and their dielectric characteristics as CPW substrate by means of Terahertz Time Domain Spectroscopy

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dc.contributor.affiliation"Instituto de Micro y Nanotecnología CNM, CSIC, Calle Isaac Newton, 8. Tres Cantos, Madrid, 28760, Spain"," Instituto Politécnico Nacional, UPALM, Edif. Z-4 3er Piso, México CDMX, 07738, Mexico"," Instituto IMDEA-nanociencia, Calle Faraday, 9, Madrid, 28049, Spain"en
dc.contributor.affiliation000000041762408X
dc.contributor.authorDiaz-Albarran L.M.
dc.contributor.authorLugo-Hernandez E.
dc.contributor.authorRamirez-Garcia E.
dc.contributor.authorEnciso-Aguilar M.A.
dc.contributor.authorValdez-Perez D.
dc.contributor.authorCereceda-Company P.
dc.contributor.authorGranados, Daniel
dc.contributor.authorCosta-Krämer J.L.
dc.date.accessioned2020-12-04T15:25:32Z
dc.date.available2020-12-04T15:25:32Z
dc.date.issued2018
dc.identifier.doi10.1016/j.mee.2018.01.036
dc.identifier.urihttp://hdl.handle.net/20.500.12614/1553
dc.journal.titleMicroelectronic Engineering
dc.language.isoen
dc.page.initial84
dc.relation.projectIDTEMPWe gratefully acknowledge technical help in the fabrication of the optical masks by Manuel Rodriguez from IMDEA Nanociencia (Madrid, Spain). The authors acknowledge fruitful discussions with members of the Technical support from MiNa Laboratory at IMN-CSIC ( http://www.imn.cnm.csic.es/es/servicios ). We also thank financial support from the “ Comunidad de Madrid ” under the contract project S2013/ICE-2822 Space-TEC CM and the financial support of Instituto Politecnico Nacional under the contract SIP/20151735 .
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 España*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/*
dc.titleDevelopment and characterization of cyclic olefin copolymer thin films and their dielectric characteristics as CPW substrate by means of Terahertz Time Domain Spectroscopy
dc.typeresearch article
dc.volume.number191
dspace.entity.typePublication
relation.isAuthorOfPublication5b34b8c8-da33-4a46-9caf-81a5b7b35827
relation.isAuthorOfPublication.latestForDiscovery5b34b8c8-da33-4a46-9caf-81a5b7b35827

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