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Growth of magnesium nitride thin films on various surfaces via atomic-nitrogen-assisted molecular beam epitaxy at moderate substrate temperatures

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dc.contributor.affiliation"Department of Physics and Astronomy, KU Leuven, Leuven, 3000, Belgium"," Department of Materials Engineering, KU Leuven, Leuven, 3000, Belgium"," Soitec Belgium NV, Hasselt, 3500, Belgium"," IMDEA Nanociencia, Madrid, 28049, Spain"," Coating and Shaping Technologies (CAST), Materials Unit, VITO NV, Boeretang 200, Mol, 2400, Belgium"en
dc.contributor.affiliation000000041762408X
dc.contributor.authorSchouteden K.
dc.contributor.authorCeccon L.
dc.contributor.authorRecaman Payo M.
dc.contributor.authorSun Y.
dc.contributor.authorHsu W.-F.
dc.contributor.authorRangasamy V.S.
dc.contributor.authorDerluyn J.
dc.contributor.authorMenghini, Mariela
dc.contributor.authorSeo J.W.
dc.contributor.authorLocquet J.-P.
dc.date.accessioned2022-11-03T11:46:38Z
dc.date.available2022-11-03T11:46:38Z
dc.date.issued2022
dc.identifier.doi10.1007/s00339-022-06135-2
dc.identifier.urihttp://hdl.handle.net/20.500.12614/3188
dc.issue.number995
dc.journal.titleApplied Physics A: Materials Science and Processing
dc.language.isoen
dc.relation.projectIDTEMPThe authors acknowledge financial support from the EU H2020 Project No. 721107 GaNonCMOS and the KU Leuven projects (Grant No. GOA/13/011, Fundamental challenges in Semiconductors, and Grant No. C14/17/080, 2D Oxides). Yue Sun is grateful to China Scholarship Council (China).
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 España*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/*
dc.titleGrowth of magnesium nitride thin films on various surfaces via atomic-nitrogen-assisted molecular beam epitaxy at moderate substrate temperatures
dc.typeresearch article
dc.volume.number128
dspace.entity.typePublication
relation.isAuthorOfPublication0b925c2e-543e-4f0e-8775-d861b13c6752
relation.isAuthorOfPublication.latestForDiscovery0b925c2e-543e-4f0e-8775-d861b13c6752

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