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High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

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dc.contributor.affiliation"Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, Netherlands"," Kavli Institute of Nanoscience, Delft University of Technology, National Centre for HREM, Lorentzweg 1, Delft, 2628 CJ, Netherlands"," Instituto Ciencia Molecular (ICMol), Univ. Valencia, C/Catedrático José Beltrán 2, Paterna, E-46980, Spain"," Instituto Madrileño de Estudios Avanzados en Nanociencia (IMDEA-Nanociencia), Madrid, 28049, Spain"en
dc.contributor.affiliation000000041762408X
dc.contributor.authorCartamil-Bueno S.J.
dc.contributor.authorSteeneken P.G.
dc.contributor.authorTichelaar F.D.
dc.contributor.authorNavarro-Moratalla E.
dc.contributor.authorVenstra W.J.
dc.contributor.authorvan Leeuwen R.
dc.contributor.authorCoronado E.
dc.contributor.authorvan der Zant H.S.J.
dc.contributor.authorSteele G.A.
dc.contributor.authorCastellanos-Gomez A.
dc.date.accessioned2020-12-04T12:17:08Z
dc.date.available2020-12-04T12:17:08Z
dc.date.issued2015
dc.identifier.doi10.1007/s12274-015-0789-8
dc.identifier.urihttp://hdl.handle.net/20.500.12614/1033
dc.journal.titleNano Research
dc.language.isoen
dc.page.initial2842
dc.relation.projectIDinfo:eu-repo/grantAgreement/EC/FP7/318287/EU/Operating ICT basic switches below the Landauer limit/LANDAUER
dc.relation.projectIDinfo:eu-repo/grantAgreement/EC/FP7/604391/EU/Graphene-Based Revolutions in ICT And Beyond/GRAPHENE
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 España*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/*
dc.titleHigh-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2
dc.typeresearch article
dc.volume.number8
dspace.entity.typePublication

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