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High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

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dc.contributor.affiliation"Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, Netherlands"," Kavli Institute of Nanoscience, Delft University of Technology, National Centre for HREM, Lorentzweg 1, Delft, 2628 CJ, Netherlands"," Instituto Ciencia Molecular (ICMol), Univ. Valencia, C/Catedrático José Beltrán 2, Paterna, E-46980, Spain"," Instituto Madrileño de Estudios Avanzados en Nanociencia (IMDEA-Nanociencia), Madrid, 28049, Spain"en
dc.contributor.affiliation000000041762408X
dc.contributor.authorCartamil-Bueno S.J.
dc.contributor.authorSteeneken P.G.
dc.contributor.authorTichelaar F.D.
dc.contributor.authorNavarro-Moratalla E.
dc.contributor.authorVenstra W.J.
dc.contributor.authorvan Leeuwen R.
dc.contributor.authorCoronado E.
dc.contributor.authorvan der Zant H.S.J.
dc.contributor.authorSteele G.A.
dc.contributor.authorCastellanos-Gomez A.
dc.date.accessioned2020-12-04T12:17:08Z
dc.date.available2020-12-04T12:17:08Z
dc.date.issued2015
dc.identifier.doi10.1007/s12274-015-0789-8en
dc.identifier.urihttp://hdl.handle.net/20.500.12614/1033
dc.journal.titleNano Researchen
dc.language.isoenen
dc.page.initial2842en
dc.relation.projectIDinfo:eu-repo/grantAgreement/EC/FP7/318287/EU/Operating ICT basic switches below the Landauer limit/LANDAUERen
dc.relation.projectIDinfo:eu-repo/grantAgreement/EC/FP7/604391/EU/Graphene-Based Revolutions in ICT And Beyond/GRAPHENEen
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 España*
dc.rights.accessRightsopen accessen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/*
dc.titleHigh-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2en
dc.typeresearch articleen
dc.volume.number8en
dspace.entity.typePublication

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