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Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene
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Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene
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Date
2022
Authors
Lancaster S.
Arnay I.
Guerrero R.
Gudin A.
Mikolajick T.
Perna, Paolo
Slesazeck S.
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http://hdl.handle.net/20.500.12614/3204
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